Nanoscale AFM-CD standard

The Nanoscale AFM-CD standard (CD, critical dimension) contains patterns on the nanometer scale for the linewidth and also the pitch calibration of scanning probe microscopy methods (atomic force microscopy (AFM)).
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Nanoscale Linewidth / Pitch standard

The Nanoscale Linewidth / Pitch standard contains patterns on the nanometer scale for the linewidth calibration and resolution-check of high-resolution optical microscopy techniques like deep ultraviolet microscopy (UVM) and confocal laser scanning microscopy (CLSM).
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AFM-Tip characterizer

The AFM-tip characterizer contains patterns for an in-situ determination of the AFM-tip shape.
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